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  • Scope of the Workshop

    This workshop is devoted to materials research, materials properties and interactions. Starting as a workshop on refractory metals and silicides in the 80s, moving to materials for advanced metallization in 1995, this year’s workshop addresses new and challenging topics in the field of BEOL solutions, novelties in alternative interconnect systems and more widely advanced materials and structures relevant to micro and nano-electronics.

    The objective of the workshop is to provide a forum for open discussions between science and industrial application. It is dedicated to material scientists, process and integration engineers and Ph-D students.

    Topics include both fundamental and applied research, as well as issues related to introduction into manufacturing. With the progressive downscaling of device dimensions and the simultaneous demand for more functionality, the challenges have become tremendous. New and extensive materials research is needed to further follow IC scaling as well as to develop new devices at the nanoscale.

    Invited talks will be given by scientific and technical leaders in each of the key areas to present the current state-of-the-art and to stimulate technical discussions.

  • Key dates

    Final Announcement : October 21, 2011
    Deadline of paper submission extended : March 26, 2012

    Full-length papers will be published in a special issue of Microelectronic Engineering. Submission of the papers will be due at the beginning of the workshop.
  • Previous Editions

  • For further information

    Registration Organization
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    Contact: Thierry CHEVOLLEAU
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